JPH058500Y2 - - Google Patents

Info

Publication number
JPH058500Y2
JPH058500Y2 JP1985022395U JP2239585U JPH058500Y2 JP H058500 Y2 JPH058500 Y2 JP H058500Y2 JP 1985022395 U JP1985022395 U JP 1985022395U JP 2239585 U JP2239585 U JP 2239585U JP H058500 Y2 JPH058500 Y2 JP H058500Y2
Authority
JP
Japan
Prior art keywords
opening
base body
tip
base
air purge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985022395U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61139441U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985022395U priority Critical patent/JPH058500Y2/ja
Publication of JPS61139441U publication Critical patent/JPS61139441U/ja
Application granted granted Critical
Publication of JPH058500Y2 publication Critical patent/JPH058500Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP1985022395U 1985-02-19 1985-02-19 Expired - Lifetime JPH058500Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985022395U JPH058500Y2 (en]) 1985-02-19 1985-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985022395U JPH058500Y2 (en]) 1985-02-19 1985-02-19

Publications (2)

Publication Number Publication Date
JPS61139441U JPS61139441U (en]) 1986-08-29
JPH058500Y2 true JPH058500Y2 (en]) 1993-03-03

Family

ID=30514651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985022395U Expired - Lifetime JPH058500Y2 (en]) 1985-02-19 1985-02-19

Country Status (1)

Country Link
JP (1) JPH058500Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758699B2 (ja) * 1986-12-24 1995-06-21 三菱化学株式会社 ▲ｉｉｉ▼−▲ｖ▼族化合物半導体ウエハーのアニール方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4944002U (en]) * 1972-07-20 1974-04-18
JPS5188078A (en]) * 1975-01-29 1976-08-02

Also Published As

Publication number Publication date
JPS61139441U (en]) 1986-08-29

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